Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses

This paper presents the results of a comprehensive study pull-in phenomenon in hybrid levitation microactuator (HLMA), which square-shaped proof masses (PMs) different sizes, namely, length sides 2.8 and 3.2 mm thicknesses 25 10 μm were electromagnetically levitated. The actuation PMs was performed by electrostatic force generated set energized electrodes acting on bottom surface along vertical direction. parameters, such as displacements corresponding applied voltages, measured with developed setup. experimental measurements showed that is nonlinearly dependent size mass height. In particular, it found levitated within height range from 140 to 170 can be stably displaced 30 μm. extensively simulated analytical model means quasi-FEM method. direct comparison simulation very good agreement between theory experiments.